Hybrid metrology for nanometric energy harvesting devices

Abstract The parametrization of the nanostructures covering energy harvesting (EH) devices play an important role in maximizing exploitation light and so does selection best suitable fabrication measurement methods. optical inspection periodic cylindrical for EH is a challenging task both manufacturers metrologists. In this paper we present process nanowires (NWs) along with non-optical techniques which were used to measure geometrical parameters these nanostructures. explains benefits hybrid metrology that combine data from different tools obtain more accurate dimensional information about measured NW samples than those can be achieved by using only one instrument thereby improve process. Measurement procedure determination uncertainties down 2 nm are provided discussed detail.